IPEX-700 シリーズ

産業用エキシマレーザー

経済的なIPEX700シリーズはトータルコストを最小限に抑え、長時間の運転を可能としています。応用範囲はセラミックスのマーキングから、微細加工まで多岐にわたっています。PLD(パルスレーザーデポジション)、リフト・オフ・プロセス、表面改質、アニーリング、等。高品質のビーム、安定したエネルギー、優れたポインティングスタビリティ。高い安定光学マウントを採用、PLD用途にも最適。メンテナンスは片側アクセス、発振ガスを充填したまま、共振器のクリーニングが可能

商品コード: ipex700series 商品カテゴリー:

説明

Features

  • exciPure™  technology for increddible 10X gas lifetimes and the lowest cost of operation
  • No expensive cryogenic gas purifier is required
  • EasyClean automated optics seals to retain gas fill and reduce downtime during
    optics maintenance 
  • Optional High-Brightness optics for applications requiring low beam divergence or extended coherence length
  • High-stability optics mounts for ultimate beam pointing accuracy 
  • Simple integration into industrial processing systems
  • Microsoft® Surface Pro 4 remote control for the ultimate in simple operation, can be operated as a tablet or with the keyboard

Benefits

  • Massive dynamic gas lifetime, low operating cost
  • Simplifies optical maintenance, retains gas fill and passivation
  • Delivers 200 microradian pointing stability
  • No realignment required after cleaning or replacing optics
  • Fast, precise energy stabilization in internal, burst and external trigger modes
  • Excellent energy stability, better than 1.0% (KrF)
  • Removes particulates and maintains optics cleanliness

Applications

  • Pulsed Laser Deposition
  • Precision Manufacturing
  • Material Processing
  • Drilling
  • Wire Stripping
  • Scientific Research
  • LIDAR
  • Laser Induced Breakdown Spectroscopy

仕様

Wavelength193nm ArF248nm KrF308 XeCl351 XeF
Maximum Pulse Energy (mJ) IPEX-740230475300275
Maximum Pulse Energy (mJ) IPEX-760250700600350
Stabilized Pulse Energy (mJ) IPEX-740150400250225
Stabilized Pulse Energy (mJ) IPEX-760200600500300
Stabilized Average Power (W)
 IPEX-74615402522
  IPEX-7447.5201211
  IPEX-7423.71065.5
  IPEX-76610302515
  IPEX-764618109
  IPEX-7623954.5
Maximum Repetition Rate (Hz)
  IPEX-746100100100100
  IPEX-74450505050
  IPEX-74225252525
  IPEX-76650505050
  IPEX-76430302030
  IPEX-76215151015